High Purity Gas Tube

High purity gas supply, which is indispensable for equipment for vacuum processes, is the key factor of manufacturing IT equipment such as semiconductors, and the tube to supply gas is also required high cleanliness.

Mirapro has set up a production line dedicated to high purity gas tube in a clean room, and in addition to managing materials, thoroughly suppresses the generation of particles during the cutting and welding processes. We also developed welding conditions of the tube and inspection method for inside tube, and provide high purity gas tube that can be used safely in production equipment.

Not only gas tube, we also provide gas panel module assemblies.

Production・Inspection line dedicated to high purity gas tube

Design and Contract manufacturing of Gas Panel Module
Dedicated line that ensures cleanness and illuminance
Welding conditions to ensure gas purity

Feature

Manufacturing in a clean room (All process)
Cleanliness: FED standard class 1000 (Partly 100)
Materials: SUS304, SUS316, SUS316L
Surface Finish: Electro Polish
Size: 1/4”, 3/8”, 1/2”