In the semiconductor manufacturing process with vacuum, the vacuum exhaust piping to create high level of vacuum environment and high purity gas supply line for semiconductor manufacturing process under vacuum are required.
The vacuum piping material is mainly stainless steel designed by piping engineering to optimize gas flow line among miniaturization of semiconductor manufacturing equipment and facility layout.
Mirapro is supplying standard vacuum components and manufactures vacuum piping including formed bellows and welded bellows. And Mirapro has a timely production and delivery system by internal machining and welding process to meet various customer requirements for tee, elbow, long pipe, reducer etc. which minimized pipe connection by clamping.